MICROMECHANICAL TRANSDUCER SENSING ELEMENT Russian patent published in 2007 - IPC H01L29/84 

FIELD: gravitational-inertial micromechanical devices for controlling miscellaneous mobile objects and for their motion indication.

SUBSTANCE: proposed micromechanical transducer sensing element assembled on single-crystalline silicon substrate positioned in plane 100 has inertia mass suspension in the form of base-mounted overhung flexible components affording two working degrees of freedom for this mass in its translational motion within substrate aligned with plane 100 of silicon crystal lattice, as well as capacitive systems for measuring inertia mass displacement and for applying forces on them in the form of interdigital structures of electrodes. Each of suspension flexible components is made in the form of L-shaped beam assembled of two identical members, one of them being positioned along direction 010 of silicon crystal lattice and other one, along direction 001; suspension has eight identical flexible components disposed in pairs in plane 100 symmetrically relative to geometry center of inertia mass along directions turned through 45 deg. relative to directions 010 and 001 of silicon crystal lattice; width l to length L ratio of interdigital structure electrode pin, as viewed from top, is chosen from condition l/L² ≥ 10^-3ω, where ω is inherent frequency of inertia mass suspension with respect to working degrees of freedom; maximal clearance d₂ between opposing pins of interdigital structure electrodes is chosen from condition 1.6d₁ < d₂ < 3d₁, where d₁ is minimal clearance between adjacent opposing pins of interdigital structure electrode.

EFFECT: enhanced precision of micromechanical transducer incorporating proposed sensing element.

1 cl, 5 dwg