FIELD: electronic engineering, in particular, methods for manufacturing powerful electro-vacuum devices.
SUBSTANCE: method includes excitation of gases being analyzed due to impulse energetic influence on electrodes. Duration of impulse energetic influence is selected to be less than time of flight of any one of gases being analyzed towards manometer transformer, but more than minimal excitation time of any one of gases being analyzed. As manometer transformer, magnetic electro-discharge pump built into electro-vacuum device is used. In process of measurement, stepped curve of pump current growth is measured, number of steps k on the curve is determined. Using features of current growth, ascending series of all values tn is determined - for time which passed since the moment of impulse energetic influence up to the middle of growth front of n step, where n=1,...,k. On basis of this information, mass number is determined for gases which escape into the volume of electro-vacuum device, as well as alternation of their partial pressures.
EFFECT: simplified method for measuring partial pressures of gases in a powerful electro-vacuum device, possible examination of processes, occurring in its vacuum space.
2 cl, 2 dwg, 1 tbl
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Authors
Dates
2007-09-20—Published
2006-01-10—Filed