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2 312 060

(13)

(51)

IPC

C01B21/72(2006-01-01)

(21) (22)

Application

2005102149/15, 2005-01-28

(24)

Start date

2005-01-28

(22)

Actual filing date

2005-01-28

(45)

Published

2007-12-10

(72)

Inventor

Afonin Jurij DmitrievichBeketov Askol'D RafailovichBeketov Dmitrij Askol'DovichChernyj Nikita L'Vovich

(73)

Holder

Obshchestvo S Ogranichennoj Otvetstvennost'Ju Nauchno-Tekhnicheskikh Razrabotok" Nauchno-Tekhnicheskikh Razrabotok")

METHOD FOR PREPARING ALUMINUM NITRIDE POWDER Russian patent published in 2007 - IPC C01B21/72

Abstract RU 2312060 C2

FIELD: chemical technology.

SUBSTANCE: method involves load of charge consisting of solid aluminum and aluminum (III) fluoride into tube furnace. Charge is heated to 1000-1300C to obtain aluminum fluoride (I) that is subjected then to interaction with nitrogen, ammonia or other nitrogen-containing gas on surface of this charge under atmosphere pressure, and wherein gas is fed toward to charge moving. Method provides preparing finely dispersed aluminum fluoride powder of high purity, enhancing coefficient of using aluminum (III) fluoride and enhanced economy of the process. Invention can be used in microelectronics.

EFFECT: improved preparing method.

1 tbl

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RU 2 312 060 C2

Authors

Afonin Jurij Dmitrievich

Beketov Askol'D Rafailovich

Beketov Dmitrij Askol'Dovich

Chernyj Nikita L'Vovich

Dates

2007-12-10—Published

2005-01-28—Filed