FIELD: chemistry.
SUBSTANCE: reaction chamber is made of heat-resistant steel, lined with aluminium nitride, provided with a gas-tight means connected to the chamber body and a flexible conduit that is sealed to the supply means for nitrogen-containing gases, and is provided with a heating device capable of creating a temperature gradient along the reaction chamber. At the same time the camera is located vertically and is made detachable with the formation of the lower, middle and upper sections. The lower and middle sections are separated by a perforated partition, and the middle and upper sections are separated by a filter.
EFFECT: increasing the yield of aluminium nitride, reducing the intensity of the agglomeration process and reducing the time and energy consumption for the process of aluminium nitride production.
4 cl, 2 dwg, 1 tbl, 1 ex
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Authors
Dates
2017-09-18—Published
2014-09-29—Filed