METHOD OF PRODUCING SUBMICRON CRYSTALS OF ALUMINIUM NITRIDE Russian patent published in 2020 - IPC C30B23/00 C30B29/38 C30B29/40 C30B29/66 C01B21/72 B82B3/00 B82Y40/00 B82Y20/00 B82Y5/00 

Abstract RU 2738328 C2

FIELD: chemistry.

SUBSTANCE: invention relates to chemical engineering of submicron aluminium nitride crystals in the form of hexagonal prisms and a combination of a hexagonal prism with a dipyramid and pinacoid, which can be used in creating elements of nano-, micro- and optoelectronics, as well as luminescent-active micro-size sensors for medical and biological purposes. Granules of metal aluminium are mixed with powder of aluminium trifluoride in ratio 1:1–3:1 and mixture is heated to temperature of formation of aluminium sub-fluoride vapours, equal to 1050–1150 °C, in an ammonia atmosphere fed into space above liquid aluminium with volumetric feed rate below 50 ml/min at absolute pressure 0.03–0.07 MPa.

EFFECT: technical result consists in obtaining aluminium nitride crystals with the same fractional size from 70 nm to 1 mcm.

1 cl, 3 dwg, 2 ex

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RU 2 738 328 C2

Authors

Afonin Yurij Dmitrievich

Chaikin Dmitrii Vitalievich

Vokhmintsev Alexander Sergeevich

Weinshtein Ilya Aleksandrovich

Shulgin Boris Vladimirovich

Dates

2020-12-11Published

2019-04-22Filed