FIELD: methods and devices for measuring oscillation frequency of multi-cantilever.
SUBSTANCE: in the method a set of cantilevers having different lengths and different native frequencies and positioned in groups along radiuses from spiral base, are lit by common laser excitation spot. Simultaneously, native oscillations are excited in the set of cantilevers by continuous light excitation to measure oscillations. Device contains a set of cantilevers, having different lengths and different native frequencies and positioned in groups along radiuses from spiral base, device for simultaneous excitation of native oscillations of cantilevers by continuous light excitation. Microscope with scanning probe with usage of device for measuring frequency of multi-cantilever oscillations for self-excitation of native frequencies of cantilevers, to determine interaction between sample and probe at the end of each cantilever in form of alteration of frequency of self-excited oscillation, of amplitude of self-excited oscillation or phase of self-excited oscillation.
EFFECT: prevented necessity to include an excitation element into composition of each cantilever, detection and simplification of structure of cantilever matrix due to optical pumping and optical measurement, ensured high values of quality and application of different high frequency operations and modified methods for cantilevers.
19 cl, 6 dwg
