FIELD: measuring equipment.
SUBSTANCE: system of detection of a probe (74) for use with a scanning probing microscope contains a system of detection of height (88) and a system of detection of a deviation (28). When the sample surface is scanned, light reflected from a probe (16) of the microscope is divided into two components. The first component (84) is analysed by system of detection of a deviation (28) and used in a system of feedback, which supports an average deviation of a probe as in essence to constant during scanning. The second component (86) is analysed by the system of detection of height (88), from which the indication of height of a probe is produced over the fixed control point and a by means of it the image of a surface of a sample is generated.
EFFECT: functionality increase, improvement of quality of an image.
37 cl, 7 dwg
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