FIELD: instrumentation.
SUBSTANCE: system (29) of dynamic probe detection is designed to be used with a scanning probe microscope of the type including a probe (18) which is periodically travelling to and from the sample surface. At sample surface scanning an interferometer (88) forms an output height signal indicating the path difference between the light reflected from the probe (80a, 80b, 80c) and the height reference beam. A signal processing device tracks the height signal and receives measurement for each oscillation cycle which indicates the probe height. The detection system can also comprise a feedback mechanism acting to keep the average value of the feedback parameter at the specified level.
EFFECT: improved accuracy and speed of image data acquisition.
39 cl, 6 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| SYSTEM OF DETECTION OF PROBE | 2009 |
|
RU2512674C2 |
| DEVICE FOR COMPENSATION OF NATURAL OSCILLATIONS OF A PROBE NEEDLE OF A SCANNING MICROSCOPE | 2019 |
|
RU2703607C1 |
| PROBE FOR NUCLEAR POWER MICROSCOPE | 2004 |
|
RU2356110C2 |
| SCANNING PROBING MICROSCOPE | 2003 |
|
RU2334214C2 |
| SCANNING PROBING MICROSCOPE WITH COMPACT SCANNER | 2012 |
|
RU2571449C2 |
| METHOD MEASURING CHARACTERISTICS OF SURFACE MAGNETIC FIELD WITH USE OF SCANNING SOUNDING MICROSCOPE | 2000 |
|
RU2193769C2 |
| METHOD TO USE SEMI-CONTACT MODE WITH FIXED PEAK OF FORCE FOR MEASUREMENT OF PHYSICAL PROPERTIES OF SAMPLE | 2011 |
|
RU2571446C2 |
| SURFACE RELIEF DETERMINING METHOD | 2011 |
|
RU2479063C1 |
| NUCLEAR-POWER SCANNING PROBING MICROSCOPE (NPSPM) USING QUASI PARTICLES | 2014 |
|
RU2563339C1 |
| IMAGE FORMING METHOD IN SCANNING PROBE MICROSCOPY | 2017 |
|
RU2698953C2 |
