FIELD: electrical engineering; instruments and devices for heat treatment of materials and products.
SUBSTANCE: proposed electron-beam gun has cylindrical post incorporating high-voltage connector, cooling system accommodating vacuum-tight insulator of cathode-heater assembly, anode flange, and beam guide made in the form of sealed capsule with built-in lenses. Cooling system is made in the form of two circuits of which one has throttling valve, resistor, and cooling ducts for hot-cathode and heater holders. Other circuit is set up of sealed circular flange joined with beam-guide water jacket. Vacuum chamber encloses beam-guide capsule in axisymmetrical manner. Adapter interconnecting beam guide and process chamber is made in the form of water-cooled pipe enclosed by double-pole magnetic lens joined with conical insert.
EFFECT: enhanced reliability, service life, and specific power of beam, enlarged functional capabilities.
3 cl, 1 dwg
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Authors
Dates
2008-01-10—Published
2005-12-15—Filed