FIELD: meso-micro-electro-mechanical systems.
SUBSTANCE: meso-micro-electro-mechanical system (900, 1100) contains a substrate (215), supporting element (405, 1160), positioned on the surface of the substrate, first electrostatic configuration (205, 1105, 1110, 1115, 1120), positioned on the surface of the substrate, and glass element (810). The glass element (810) has fastened area (820), which is attached to supporting element, and has second electrostatic configuration (815, 1205, 1210, 1215, 1220) on console location of glass element. The second electrostatic configuration practically has same extent and is parallel to the first electrostatic configuration. The second electrostatic configuration is separated by free interval (925) from the first electrostatic configuration, when the first and the second electrostatic configurations are in conditions when excitation is absent. In certain variants of realization, a mirror is formed using electrostatic materials, which constitute the second electrostatic configuration. The glass element may be configured using cleaning by sandblast machine (140).
EFFECT: increased efficiency.
3 cl, 13 dwg
