FIELD: spectral analysis.
SUBSTANCE: measuring device and method for conducting optical emission spectroscopy without vacuum processing or blow-throwing. Arc electrode has point to be cut at specific angle. Holder supports arc electrode at preset distance from analyzed material. Current and voltage supply generates and keeps voltage between arc electrode and material to be analyzed and provides current flowing through arc electrode. Thickness of arc electrode equals to 3-10 mm, angle of cut of point is 40°-120°. Length of arc charge equals to 0,5-3,0 mm. Voltage of igniting spark charge equals to 5-20 kV, voltage of arc charge equals to 20-160 V and arc charge current belongs to interval of 1-10A. Collecting and receiving op6tical systems provide gathering of optical radiation and measurement of its intensity at wavelength of 193 nm minimum.
EFFECT: improved deficiency; increased reliability of operation.
17 cl, 7 dwg
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