EXCIMER LASER AND METHOD FOR STIMULATING ITS LASING Russian patent published in 2008 - IPC H01S3/97 

FIELD: laser engineering.

SUBSTANCE: proposed excimer laser has chamber filled with gas mixture, electrodes for pre-ionizing electrode gap and initiating pumping, charge and discharge circuit for pulse feed of pumping discharge, and resonator. At least one of electrodes is made in the form of plasma sheet whose potential edge is disposed in electrode gap electric field maximum. Discharge circuit meets following condition: LC = (1 - 1) x 10^-16 HF, where L is discharge circuit inductance; C is discharge circuit capacitance. Proposed method for stimulating lasing in excimer laser includes firing of pumping discharge in gas mixture Ne = Xe/HCl and generation of lasing pulse. Pumping discharge is fired when discharge current density is built up to provide for firing plurality of high-electron-density macro-channels uniformly distributed throughout laser active medium. At least one of electrode gap pre-ionization and pumping discharge firing electrodes is made in the form of plasma sheet whose potential edge is disposed in electrode-gap electric field maximum.

EFFECT: enhanced specific lasing energy.

2 cl, 1 dwg