METHOD OF PRODUCING ACTIVE MEDIUM OF KrF LASER Russian patent published in 2016 - IPC H01S3/225 H01S3/97 

FIELD: physics.

SUBSTANCE: method of producing an active medium of a KrF laser includes igniting a space discharge in a laser mixture after applying pulsed voltage across a discharge gap, introducing spark preionisation, which provides gas preionisation in the discharge gap, and a breakdown of the discharge gap. The space discharge is ignited with a bipolar pulse of discharge current with the overall duration of 70-85 ns, a leading edge of 8-10 ns and maximum specific pumping power of (3.5-4.5) MW/cm³, thereby producing an active medium with a longer life.

EFFECT: high efficiency and energy of laser radiation.

2 dwg