FIELD: instrument making.
SUBSTANCE: invention relates to instrument making and can be used in development and production of high-output high-efficiency excimer lasers with the 20 to 40 ns-long radiation pulses. In compliance with this invention, the proposed excimer laser features the discharge circuit inductivity allows the discharge current density increase rate of dj/dt≥5x1010 A/cm2s and firing the pump discharge with specific power of 3±0.5 MV/cm3.
EFFECT: higher efficiency and output of laser generation.
1 dwg
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