FIELD: metallic coatings.
SUBSTANCE: invention relates to di-cuprous oxalate complexes stabilized with components of neutral Lewis base. There are described compounds of general formula (I) wherein copper is oxidation state +1 and R represents R-C≡C-R', which has at least one silyl group, R'HC=CHR containing at least one silyl group, or R'Si-C=C-R', where R represents A or at least one group SiR'3, R' represents R, H, or A, wherein L, R, and R', independently of each other, each can assume identical or different significances in different molecule positions, and A represents C1-C30-alkyl with nonbranched or branched chain. Described is also a method of preparing compounds of general formula (I) and a method of preparing high-cleaned thin copper layers.
EFFECT: enabled preparation of heat resistant fluorine-free copper(I) precursors for depositing metallic copper.
21 cl, 4 dwg, 4 ex
| Title |
Year |
Author |
Number |
| DICOPPER (I) OXALATE COMPLEXES AS PRECURSORS FOR DEPOSITION OF COPPER METAL |
2004 |
|
RU2382043C2 |
| DERIVATIVES OF PYRIDINE AND HERBICIDE AGENT BASED ON THEREOF |
2002 |
- Khaaf Klaus
- Vill'Ms Lotar
- Auler Tomas
- Menne Khubert
- Biringer Khermann
|
RU2304141C2 |
| METHOD OF OBTAINING ORGANIC SALTS, WHICH CONTAIN ANIONS OF BIS(PERFLUOROALKYL)PHOSPHINATE |
2004 |
- Ignat'Ev Nikolaj
- Vel'Ts-Birmann Urs
- Vill'Ner Khel'Ge
- Kucherina Andrij
|
RU2362778C2 |
| METHOD OF IMPROVING STRENGTH WHEN MELTING POLYPROPYLENE |
1998 |
- Khogt Andreas Kherman
- Fisher Bart
- Spejkerman Ges'E Klasina
|
RU2205190C2 |
| 1,3-DISUBSTITUTED 4-METHYL-1H-PYRROL-2-CARBOXAMIDES AND USE THEREOF FOR PREPARING DRUGS |
2007 |
- Oberbersh Shtefan
- Zundermann Bernd
- Zundermann Korinna
- Bejsterveld Ehdvard
- Khennis Khagen-Genrikh
|
RU2463294C2 |
| NOVEL COMPLEXES OF METALS WITH N-AMINOGUANIDINE, INTENDED FOR USE IN MAKING THIN FILMS AND FOR CATALYSIS |
2015 |
- Zundermajer Jerg
- Shlekhter Katrin
|
RU2705362C2 |
| DERIVATIVES OF 1,2,3,4-TETRAHYDRONAPHTHALENE, METHODS OF THEIR SYNTHESIS, PHARMACEUTICAL COMPOSITION BASED ON THEREOF AND METHOD OF TREATMENT |
1998 |
- Berg Stefan
- Linderberg Mats
- Ross Svante
- Torberg Set-Olov
- Ul'Ff Bengt
|
RU2194696C2 |
| AZAINDOLE-INDOLE DERIVATIVES, METHODS FOR PREPARING AND USING |
2008 |
- Cheng Tszjansaj
- Jao Kizheng
- Uong Zhaokhuj
- Khua Vehji
|
RU2486184C2 |
| SUBSTITUTED BICYCLIC IMDAZO-3-YLAMINES SUITABLE FOR REGULARING mGluR5-RECEPTOR |
2005 |
- Kjunert Sven
- Oberbersh Shtefan
- Zundermann Korinna
- Khaurand Mikhaehl'
- Jostok Rut
- Shine Klaus
- Chentke Tomas
- Kristof Tomas
- Kaulartts Dagmar
- Tsemol'Ka Zaskja
|
RU2435770C2 |
| MODIFIED 2- AND 3-NUCLEOSIDES AND USE THEREOF TO PRODUCE MEDICINAL AGENT, HAVING HEPATITIS C INHIBITING ACTIVITY |
2003 |
- Sommadossi Zhan-P'Er
- La Kolla Paolo
- Storer Richard
- Gosselin Zhil'
|
RU2437892C2 |
