FIELD: measurement technology. SUBSTANCE: integral beam resistance strain converter is intended for use in equipment measuring displacement and force. It presents rectangular module made of silicon with two concentrators of mechanical stress in the form of lateral recession of preset dimensions on which working surface resistance strain gauge bridge is formed. There may be arranged recession or through holes in extreme bases on side of lateral recessions which are self-matched with boundaries of concentrators of mechanical stresses to improve characteristics of converter. Each termination pad of converter may be composed of two parts - one produced from aluminium and the other one having solder above aluminium. EFFECT: enhanced operational precision and reliability. 3 cl, 5 dwg
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Authors
Dates
1995-05-10—Published
1993-08-09—Filed