INTEGRAL PRESSURE CONVERTER Russian patent published in 1995 - IPC

Abstract RU 2035089 C1

FIELD: measurement technology. SUBSTANCE: integral pressure converter is semiconductor crystal with membrane on which working surface resistance strain gauge bridge is formed. Each resistance strain gauge is surrounded with high-doped protective region. At least one ohmic contact to crystal is placed on surface of converter and coupled to individual termination pad. For improvement of characteristics of converter each arm of bridge is formed by pair of resistance strain gauges. Each termination pad of aluminium coated with solder. EFFECT: improved operational stability, facilitated manufacture. 2 cl, 5 dwg

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RU 2 035 089 C1

Authors

Zimin V.N.

Salakhov N.Z.

Shabratov D.V.

Shelepin N.A.

Dates

1995-05-10—Published

1993-08-09—Filed