INTEGRATED BEAM STRAIN-MEASUREMENT CONVERTER Russian patent published in 1994 - IPC

FIELD: measurement technology. SUBSTANCE: integrated beam strain-measurement converter is rectangular module made of silicon with concentrator of mechanical stresses in the form of lateral recession of preset dimensions on which working surface resistance strain bridge is formed. For improvement of operational characteristics of converter there may be arranged recession or through hole self-matching boundaries of concentrator of mechanical stresses located in end of converter opposite to concentrator, on side of lateral recession. Each bonding pad of converter may be composed of two parts: one made of aluminium, and the other one of solder. EFFECT: improved accuracy of measurement of movements, accelerations, flow, force and pressures. 4 cl, 5 dwg