INSTALLATION FOR COMPLEX SURFACE PROCESSING IN VACUUM Russian patent published in 2008 - IPC C23C14/34 C23C14/02 

FIELD: mechanics.

SUBSTANCE: invention relates to vacuum-arc devices and can be used mainly in complex surface processing of the products incorporating chemical and thermal processing of the product surface with application of a functional covering. Installation contains a working chamber with an isolated product holder, an emission chamber with an expandable electrode having a wall with holes shared with the working chamber. A positive pole of the main power supply (MPS) is connected to the case of chambers, while a negative pole is designed to be connected to the said expandable electrode. The positive pole of an additional power supply (APS) is designed to be connected to the product holder with its negative pole to be connected to the case of chambers. An additional expandable electrode is arranged in the working chamber made from the material of the covering. The said electrode evaporation side faces the product holder and is designed to be connected to the MPS negative pole. The APS positive pole is designed to be connected to the expandable electrode and to the additional expandable.

EFFECT: cleaning the surface being coated by cathode dispersion and effecting chemical and thermal processing with subsequent application of functional covering.

1 dwg, 1 ex