FIELD: ion-plasma technology. SUBSTANCE: method includes filling of working chamber containing treated articles with plasma and application to articles of the positive potential. In so doing, potential is applied alternately to separate articles and/or to group of articles. Used for different types of treatment are plasma of various gases and applied to articles is positive potential relative to different elements. EFFECT: higher efficiency. 8 cl
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Authors
Dates
1995-01-09—Published
1992-07-09—Filed