DEVICE FOR VACUUM PLASMA TREATMENT OF ARTICLES Russian patent published in 2007 - IPC C23C14/32

Abstract RU 2312932 C2

FIELD: vacuum plasma treatment of articles with coats.

SUBSTANCE: proposed device has working chamber with anode which is communicated via at least one hole with chamber provided with cathode; device is also provided with DC source. Additional chamber with additional anode is connected with additional DC source and is communicated with working chamber via at least one hole. Anode is used as holder of articles and cathode is made in form of cathode of vacuum-arc discharge.

EFFECT: enhanced efficiency of chemico-thermal treatment of articles.

3 dwg, 2 ex

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RU 2 312 932 C2

Authors

Sablev Leonid Pavlovich

Shulaev Valerij Mikhajlovich

Andreev Anatolij Afanas'Evich

Dates

2007-12-20—Published

2003-04-22—Filed