METHOD OF CLEANING SURFACES OF DIELECTRIC OBJECTS (VERSIONS) Russian patent published in 2008 - IPC B08B5/00 H01J9/38 

FIELD: technological processes.

SUBSTANCE: invention pertains to cleaning surfaces of different dielectric objects, particularly chemical and medical utensils and can be used in science and technology, where the end result depends on the cleanliness of the initial surface of the used objects. The method involves cleaning the object in trays made from radiotransparent material and putting the object into an evacuated working volume of a multimode cylindrical resonator, after evacuation of which release of the working gas is regulated until stationary microwave discharge is observed in the evacuated volume of the resonator. Later release of the gas is reduced with constant pumping out until microwave discharge begins inside the object, after which release of the gas is stopped and pumping out is continued until the discharge inside the object stops. An alternative to this method differs in that release of the working gas is regulated until stationary microwave discharge begins in the volume of the resonator, and then release of the gas is stopped and pumping out is continued until discharge inside the evacuated volume stops.

EFFECT: efficient and cheap method of cleaning surfaces of dielectric objects.

2 cl, 1 dwg, 2 ex