METHOD OF GAS SENSOR PRODUCTION Russian patent published in 2008 - IPC G03F7/16 

FIELD: physics, measurement.

SUBSTANCE: method of gas sensor production includes subsequent arrangement of contacts on wafer by methods of microfabrication and formation of sensitive element on the basis of composite material that consists of polymer matrix that is reinforced with filler particles. As polymer matrix material photosensitive compositions are used. Formation of sensitive element is performed by lithography methods. Formation of sensitive element composite material layer is carried out from mixture of photosensitive composition solution in dissolvent with filler particles. Filler is mono- or polydisperse powders of nanotubes, fullerenes, soot, graphite, nanoparticles of tin oxide. Formation of sensitive element composite material layer is carried out by method of centrifugation of photosensitive composition solution mixture with filler particles. Thermal treatment of sensitive element composition material layer is carried out after performance of lithography process by thermal method at temperature that does not exceed temperature of polymer matrix destruction.

EFFECT: simplification of manufacturing technology, excluding operation of microvolume formation.

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