FIELD: chemistry.
SUBSTANCE: through thermal decomposition of silicon nitride, silicon and commercial grade gaseous nitrogen are obtained, which are continuously extracted from the reaction zone. At temperature above 360°C, thermal decomposition is achieved in an electrolysis process using an electrolyte as the reaction zone, made from a molten halide of an alkali metal. At temperatures from 1450 to not more than 1800°C, thermal decomposition of silicon nitride is carried out in a vacuum at 100 Pa pressure. At temperatures from 1800 to 2700°C, thermal decomposition of silicon nitride is carried out at pressure equal to atmospheric pressure.
EFFECT: better quality of silicon with higher output.
3 cl, 7 ex
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Authors
Dates
2009-02-10—Published
2007-03-13—Filed