FIELD: metallurgy.
SUBSTANCE: proposed line comprises fluo(ro)silicic acid production unit (6), extraction unit (5) with absorption tower (1) to trap silicon tetrafluoride and anhydrous hydrogen fluoride and condenser (2) for their separation, gas cylinder station (3) to store and transfer gases and play of silicon compounds synthesis (10) including system (7) to feed gases into reactor (7). Reactor top is arranged in resistance furnace (12) to form heating zone (13) therein while reactor bottom is connected with intake bin (18) to collect synthesised particles in removable container (17). Bin top accommodates filter (15) to discharge gas into absorption column. Reactor (7) bottom and bin (18) top are equipped with water and air cooling system (14). To produce polycrystalline silicon, this line incorporates extra gas cylinder station (8) for storage and transfer of monosilane and reaction gas and monosilane decomposition station (9) with second reactor (7').
EFFECT: enhanced performances, stable output of high-purity product, non-polluting process, lower power input.
30 cl, 2 dwg, 2 tbl, 12 ex
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Authors
Dates
2014-08-10—Published
2012-12-28—Filed