FIELD: chemistry.
SUBSTANCE: invention relates to technology of obtaining halogenide-containing silicon. Halogenated polysilane is thermally decomposed with continuous addition into reactor at the range of temperatures 350°C-1200°C and at pressure from 10-3 mbar to 1.3 bar. Silicon has content of halogenide from 1% at to 50% at.
EFFECT: obtaining sort of silicon, which can be applied for purification of metallurgical silicon.
21 cl, 1 ex
Authors
Dates
2013-12-10—Published
2009-05-27—Filed