FIELD: technological processes.
SUBSTANCE: substrate is formed in the form of plate from hard single-crystal silicon. Specified substrate anisotropic etching and dicing is done to produce blades. In process of substrate formation upper surface of plate from hard single-crystal silicon is oriented in crystallographic plane (100). Separating grooves are formed with inclined surfaces that are oriented in crystallographic planes (111). Initial oxidation of specified inclined surfaces is carried out to produce layer of silicon dioxide with thickness from 0.5 to 0.7 mcm. Moreover, oxidation is carried out in atmosphere of moist oxygen. After substrate dicing blades surfaces are repeatedly oxidised, including surfaces oriented in crystallographic planes (101).
EFFECT: increase of blade mechanical strength.
7 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| OPHTHALMIC MICROSURGICAL BLADE | 2011 |
|
RU2475219C1 |
| METHOD OF MANUFACTURING MICRONEEDLES AND MICRONEEDLES ARRAY | 2017 |
|
RU2677491C1 |
| RAZOR BLADE AND METHOD FOR MAKING IT | 2002 |
|
RU2225787C2 |
| METHOD FOR MANUFACTURING ECHELLE TYPE SILICON DIFFRACTION GRATING | 2023 |
|
RU2809769C1 |
| METHOD FOR MANUFACTURING SILICON STRUCTURES WITH DIELECTRIC INSULATION | 2022 |
|
RU2783769C1 |
| METHOD OF PRODUCING ELEMENTS WITH NANOSTRUCTURES FOR LOCAL PROBE SYSTEMS | 2015 |
|
RU2619811C1 |
| METHOD OF FORMATION OF MICROSTRUCTURAL DEVICES WITH CROSS-METALIZED HOLES ON SINGLE CRYSTALLINE SILICON SURFACE | 2018 |
|
RU2676240C1 |
| OPHTHALMOSURGICAL BLADE | 2011 |
|
RU2484781C1 |
| OPHTHALMIC MICROSURGICAL BLADE | 2011 |
|
RU2475220C1 |
| CANTILEVER WITH SILICON NEEDLE OF COMPLEX SHAPE | 2020 |
|
RU2759415C1 |
