FIELD: physics; optics.
SUBSTANCE: modulator has mirror lowered from flexible layer over vacuity. This flexible layer also forms seats and basic columns for the mirror. The alternative construction of the modulator with shared properties has mirror suspended over the vacuity. This modulator rests on seats and basic columns. Basic columns contain flexible layer located atop of flanges in the form of basic columns. The bus-type structure can be generated on the flexible layer located atop of the flanges in the form of basic columns.
EFFECT: increase of device operational performances.
38 cl, 36 dwg
