FIELD: physics, measurement.
SUBSTANCE: invention is related to methods for measurement of geometric properties of solids, in particular, for assessment of their roughness. Method for definition of fractal size of solids rough surface includes measurement of its area with the help of measures of different value, building of dependence of surface area from area of used measures, and definition of produced dependence incline, value of which is used to define fractal size. At that in order to define area of surface measured by measure of preset value, bundle of electrons is directed to investigated surface, size of its cross section is established, which provides for required area of measure. Then bundle is turned into raster, current of truly secondary electrons is measured, its mean average and minimum values are found, and product of raster area by ratio of average to minimum value of current of truly secondary electrons is determined, which is used to define area of rough surface measured by preset measure.
EFFECT: higher accuracy of fractal size definition, validity of measurements, velocity.
4 dwg
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