FIELD: topography.
SUBSTANCE: purpose of the invention is to upgrade quality of generating a topographical image of an object in a digital form by means of obtaining a micro relief of the surface due to topography contrast conditioned by collecting and registration of secondary electrons with a probe equipped with measuring head of a scanning tunnel microscope (STM); emission of the said electrons results as an inelastic interaction of a focused electron beam of SEM (electro scan microscope). Collecting and registration of secondary electrons is performed with the probe of the measuring head of STM located at a minimal distance from the surface of an object which allows registering current of secondary electrons. At that registering is carried out synchronised with a scanning mode of the electro scan microscope.
EFFECT: upgraded accuracy of topography image generation of an object.
2 cl, 8 dwg
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