DEVICE FOR MICROMOTIONS OF OBJECT Russian patent published in 2009 - IPC H01L41/00 B82B1/00 

FIELD: physics.

SUBSTANCE: invention is related to the field of scientific instrument-making and is intended for application in scanning probing microscopes and nanotechnological plants for object micromotions. Device for object micromotions comprises base, magnet with magnetic conductors, holder with collet spring, object holder, bracket, three coils and piezoelectric tube. On the basis the following components are fixed: magnet with magnetic conductors, and also one end of piezoelectric tube, the other end of which is equipped with holder with collet spring and holder of displaced object installed in spring. Magnetic conductors create magnetic gap, in which three coils are installed, at that the first coil is placed on holder of displaced object, and the second and third coils are placed on bracket connected to holder.

EFFECT: increased accuracy of micromotions object positioning due to damping of dying oscillations and improvement of extent of friction force negative effect compensation.

2 dwg