FIELD: research instrumentation engineering. SUBSTANCE: device used for displacing objects at microscopic and nanoscopic pitch has piezoelectric tube with solid external and internal electrodes, one end of tube being secured to base and its other end carrying holder with collet spring; magnet with magnetic circuits; coil; coil current control device. Coil is rigidly fixed to holder and disposed in cylindrical magnetic gap of magnetic circuit. EFFECT: reduced minimal pitch, enhanced positioning precision and displacement speed. 1 cl, 2 dwg
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Authors
Dates
2003-05-27—Published
2001-12-06—Filed