DEVICE FOR MICRODISPLACEMENT OF OBJECTS Russian patent published in 2005 - IPC

FIELD: research instrumentation engineering; devices for two-coordinate object displacement at microscopic and nanoscopic pitch.

SUBSTANCE: proposed device has base and piezotube with electrodes. One end of piezotube is secured on base and other one is provided with support and spring; the latter functions to hold object-carrying stage to support. Newly introduced in device are holder, capacitance meter, first and second printed-circuit boards. First printed-circuit board is connected to stage and second one, to base. Conductors of first and second printed-circuit boards are shaped so that overlap zones are provided between them. Capacitance between conductors of first and second printed-circuit boards in overlap zones is unambiguous function of stage coordinates.

EFFECT: facilitated determination of coordinates of object being displaced in the course of device operation.

1 cl, 5 dwg