FIELD: technological processes.
SUBSTANCE: invention is related to electron beam technology and may be used for production of superdispersed oxide, semiconductor and metal materials used as raw materials in microelectronics, modifying additives and fillers. Powder of initial substance is heated by simultaneously relativistic beam of electrons and laser radiation at atmospheric pressure to steam-phase condition. Produced vapors are cooled in gas flow until product is released.
EFFECT: increased yield of proper superdispersed powder, reduced specific power inputs, reduced share of coarse-grained fraction in finished product.
1 dwg, 3 tbl
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