APPARATUS FOR DIRECT LASER EXPOSURE Russian patent published in 2015 - IPC G03F7/20 

Abstract RU 2567013 C1

FIELD: physics.

SUBSTANCE: apparatus includes a laser radiation source, a flat and a polygonal mirror, a fθ lens, a pointing mirror, a motor, an origin sensor, a panel for mounting optical elements, a base having a horizontally mounted support. The apparatus also includes a worm, eight worm gears, two frames with recesses, eight axles fitted with rollers made of elastic material, mounted in parallel rows of four each in the frame so that a uniform gap is maintained between rollers. The gap between second and third rollers in each frame is located opposite the recess in the frame, and the frames themselves are rigidly attached to the support one opposite the other, such that the rollers are arranged vertically and form touching pair surfaces for moving the workpiece to be exposed.

EFFECT: simple apparatus.

4 dwg

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RU 2 567 013 C1

Authors

Shelavin Andrej Vasil'Evich

Saf'Jannikov Nikolaj Mikhajlovich

Dates

2015-10-27Published

2014-05-19Filed