FIELD: physics.
SUBSTANCE: in the gas-discharge ion source, the cathode and anticathode are in form of cylinders, in which grooves are made in line with the axis of the source on surfaces facing the axis. There are washers in the grooves, made from conducting foil, coated with a layer of substance with high coefficient of secondary ion-electron emission.
EFFECT: increased concentration of discharge on the axis of the ion source, increased concentration of ions in the region of the opening, through which ions come out, increased efficiency of the ion source.
2 cl, 2 dwg
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