METHOD OF OBTAINING METAL NANOPARTICLES ON BASE SURFACE Russian patent published in 2009 - IPC C23C14/58 C23C14/48 B82B3/00 

FIELD: metallurgy industry.

SUBSTANCE: invention refers to field of nanotechnology, to method of creation of metal nanoparticles on surface of base. Method involves preliminary application of metal thin-film coating on base surface and exposure of resultant coating to high-energy ion beam till coating melting and formation of variform nanoparticles of coating material on base surface. In order to create nanoparticles with diametre up to 100 nm, metal thin-film coating with thickness up to 20 nm from material with melting temperature up to 1500°C is applied on base made of inorganic glass or ceramised glass or oxidised silicium and is exposed to 1-3 pulses of nanosecond duration of powerful ion beam (PIB) composed of 70% C⁺ and 30% H⁺ with energy 300 KeV and current density 5-50 A/cm².

EFFECT: formation of nanoparticles of various forms and sizes without change of base electrical properties with reduce of exposure time to 60-180 nanosec.

2 ex