EUV RADIATION SOURCE Russian patent published in 2009 - IPC G21K5/00 

FIELD: physics.

SUBSTANCE: invention can be used for producing extreme ultraviolet (EUV) radiation. The EUV radiation source, which has two disc-shaped electrodes rigidly mounted on a rotating shaft, where the said electrodes are connected through sliding contacts to a power supply, has a system for initiating discharge in the peripheral area of the inter-electrode space and a device for putting plasma-forming metal on one of the electrodes, which is the initiating electrode and is made in form of a vessel with low-melting metal. The vessel with low-melting metal is an circular cavity, made in the initiating electrode and with external diametre which is not larger than diametre of the working area of the initiating electrode, in which an insertion made from porous material is put concentric with the circular cavity such that, one of its ends is immersed in the low-melting metal, and the second end lies in front of the working area of the initiating electrode.

EFFECT: increased energy stability of EUV radiation source.

1 dwg