HIGH-BRIGHTNESS SOURCE OF SHORT-WAVE RADIATION BASED ON LASER PLASMA Russian patent published in 2020 - IPC H01J37/75 

FIELD: physics.

SUBSTANCE: invention relates to high-brightness source of short-wave radiation based on laser plasma. Source comprises vacuum chamber (1) with a rotating target assembly (2) which supplies target (4) in the form of a layer of molten metal to interaction zone (3) with a focused laser beam (7). As a means of suppressing contaminants near interaction zone (3) there is fixed screen (12) with two holes (13), (14) for input of laser beam into interaction zone (3) and removal of useful beam of short-wave radiation (8) from it. Screen (12) can be separated from rotating target assembly (2) by slotted gaps (15), (16). Set of means of suppressing contaminants preferably includes rotation of target with high linear speed, more than 80 m/s; orientation of at least one of beams (7), (8) of laser and short-wave radiation at an angle of less than 45° to target surface; nozzle (27) supplying high-speed gas flow to interaction zone (3).

EFFECT: creation of pure high-brightness sources of short-wave radiation in the wavelength range from 0_4 to 200 nm with high service life.

19 cl, 4 dwg