DEVICE FOR RECEPTION OF POWERFUL SHORT-WAVE RADIATION FROM PLASMA DISCHARGE Russian patent published in 2009 - IPC H05G2/00 

FIELD: physics.

SUBSTANCE: invention concerns the device for reception powerful short-wave, in particular, extreme ultra-violet radiation preferentially from plasma of the pulsing vacuum discharge initiated by the laser between rotating electrodes. The device for reception of powerful short-wave radiation from discharge plasma contains the gyrations joined to drive unit's electrodes; each of them is partially immersed in a bath with liquid metal and connected to the power supply, and housings for return of liquid metal to baths. The area of each electrode moistened with liquid metal is disposed in a housing, except for a part of the surface containing a working band of an electrode, and the part of a surface containing a working band of an electrode, is executed in such way, that a normal line to an electrode surface does not coincide with a centrifugal force direction, and the projection of a centrifugal force to a tangent to an electrode surface is guided towards the housing in a plane transiting through a spin axis of the electrode, and the centrifugal force component on a normal line to a surface of an electrode is less than force of the superficial tension in a stratum of liquid metal at its separation from a surface. Thus, the housing is executed from an electrowire material and connection to the power supply of every electrode is carried out immediately through housing and a backlash filled with liquid metal between the housing and the electrode.

EFFECT: possibility to eliminate emission of yields of erosion in the condensed dropwise phase from a radiant of short-wave radiation, to raise its efficiency, energy stability and to refine functionality of the device for reception of short-wave radiation.

2 cl, 2 dwg