METHOD AND APPARATUS FOR GENERATING RADIATION FROM GD OR TB LASER PLASMA Russian patent published in 2023 - IPC H05G2/00 

FIELD: sources of X-ray radiation.

SUBSTANCE: invention relates to a radiation source based on a gadolinium (Gd) or terbium (Tb) laser plasma with a radiation wavelength of about 6.7 nm. In the device and method for generating radiation from laser plasma, a target is pulsed irradiated, which is supplied by a rotating target assembly to the zone of interaction with a focused laser beam to form a high-temperature radiating plasma. The target containing the main plasma-forming material belonging to the group Gd, Tb and/or their compounds is formed under the action of centrifugal force in the form of a ring in the annular groove facing the axis of rotation of the rotating target assembly. The target is used in the form of a powder, or a melt of a Gd, Tb eutectic alloy, or a centrifuged suspension.

EFFECT: creation of powerful high-brightness sources of soft X-ray radiation at a wavelength of about 6.7 nm, characterized by high stability, reliability and extended service life.

14 cl, 3 dwg