METHOD FOR PRODUCTION OF HIGHLY PURE MOLYBDENUM FOR SPATTERING TARGETS AND DEVICE FOR ITS REALISATION Russian patent published in 2009 - IPC C22B34/34 C22B3/20 C22B9/20 

FIELD: technological processes.

SUBSTANCE: invention is related to production of highly pure molybdenum for spattering targets. Method includes cleaning of ammonium paramolybdate in the form of solution from admixtures with ion exchange in neutral and alkalescent mediums on hydrated tin oxide and on weakly-basic anion-exchange resin AN-106. Then thermal decomposition of ammonium paramolybdate is executed at the temperature of 600-800°C to produce molybdenum oxide, as well as cleaning of molybdenum oxide by zone sublimation at the temperature of 750-800°C in continuous flow of oxygen. After cleaning, heterogeneous recovery of molybdenum oxide is carried out by hydrogen at the temperature of 700-750°C to produce molybdenum powder, as well as its pressing to produce bar. Then electronic vacuum zone recrystallisation of pressed bars is carried out to produce crystals of highly pure molybdenum, as well as electronic vacuum melting in flat crystalliser with melting of flat bars of highly pure molybdenum from each side to the whole depth at least twice. Device is also suggested for cleaning of molybdenum oxide by zonal sublimation.

EFFECT: sharp increase in purity of molybdenum intended for thin-film metallisation by magnetron spattering of targets, since purity of molybdenum to a large degree defines electrophysical parametres of applied thin layers.

2 cl, 2 dwg, 1 tbl, 1 ex