MULTIAXIS METROLOGICAL PLATFORM Russian patent published in 2009 - IPC G02B21/26 G12B21/22 F16C32/06 

FIELD: instrument engineering.

SUBSTANCE: invention refers to arts involving precision coordinate measurements of geometry and local properties of nano- and microstructure materials extended horizontally, particularly integrated microcircuits, microelectromechanical systems and nanomechanisms. This effect is ensured by a multiaxis metrological platform that comprises a desktop with applied collimating marks for gridding of vertical-way measuring probes, and a two-axis linear drive unit for horizontal movement of the desktop in mutually perpendicular directions along contactless aerostatic guides, interfaced inclined surfaces with their bases and carriages are open-jointed for pressure injection of a fluid medium. The carriage of one guide is ganged to the base of another guide provided their cooperative movements. One guide (with respect to the axis Y) is provided with the carriage that is narrowed towards the desktop, while the carriage of the other guide (with respect to the axis X) extends towards the desktop. The inclined surface of the open carriage of one guide along with the inclined surface of the open base of another guide accommodates permanent magnets, whereas the surfaces interfaced thereto comprise contactors. The permanent magnets represent inserts made of magnetised ferromagnetic material with polar tips made of soft magnetic material, as well as contractors. The base of the upper guide is connected to the carriage of the lower guide, and the base of the lower guide is hard-mounted within a bridge structure comprising the measuring probes being fixed and representing a laser or amplitude interference phase-polarising microscope.

EFFECT: invention aims at enhancement, higher reliability of measurements, mechanical rigidity of the system and sensitivity and responsiveness of the system on axial error of an actuator.

10 cl, 2 dwg