FIELD: metallurgy.
SUBSTANCE: invention relates to metallurgy and can be used to produce high-purity quartz-glass crucible in high-temperature hydrolysis of silicon tetrachloride in the presence of monomolecular water in flame. Proposed burner comprises casing with channels to feed silicon tetrachloride, combustible gas and oxygen. Note here that the first channel is located at the center, the other channels being arranged right around it. Burner casing comprises multi-layer-sectional tightly abutting diffuser that features diametre exceeding that of deposited crucible by its thickness. Note also that diffuser outlet shape is made to envelope deposited crucible up to rod axis, while diffuser inner layer is made from refractive heat conducting material.
EFFECT: reduced amount of impurities and uniform density of deposited crucible.
2 dwg
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REACTOR | 2008 |
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Authors
Dates
2010-02-10—Published
2008-12-18—Filed