REACTOR Russian patent published in 2010 - IPC C03B20/00 

FIELD: chemistry.

SUBSTANCE: invention relates to device intended for evaporation of silicon dioxide in producing crucibles from specially pure quartz glass with low content of micro impurities. Reactor, intended preferably for evaporation of silicon dioxide in producing crucibles from specially pure quartz glass with low content of micro impurities by high-temperature hydrolysis of silicon tetrachloride in the presence of monomolecular water in flame, comprises casing with evaporation chamber that has aerodynamic channels to suck off the products of vapor-phase hydrolysis of silicon tetrachloride in flame, driven rod accommodating swage, and evaporation torch. Said swage accommodates graphite substrate while said rod represents cylindrical ring with diametre not exceeding substrate diametre. Swage intended for accommodation of graphite substrate represents a hollow drop-shaped vessel with heat-insulating jacket arranged aligned with rod lengthwise axis. Note that said vessel houses pipeline to force cooling fluid.

EFFECT: increased amount of evaporated synthesised silicon dioxide, higher density of evaporated crucible and reduced amount of impurities therein.

2 dwg