METHOD OF OBTAINING TWO-PHASE NANOCOMPOSITE COATING, CONSISTING OF TITANIUM CARBIDE NANOCLUSTERS, DISTRIBUTED IN AMORPHOUS MATRIX, ON PRODUCTS FROM HARD ALLOYS Russian patent published in 2015 - IPC C23C14/35 C23C14/06 B82B1/00 

Abstract RU 2557934 C2

FIELD: chemistry.

SUBSTANCE: invention relates to field of obtaining nanocomposite coatings and can be used in creation of optic microelectronic devices and materials with increased corrosion resistance and wear resistance. Method of obtaining two-phase nanocomposite coating, consisting of titanium carbide nanoclusters, distributed in amorphous hydrocarbon matrix, on products from hard alloys, includes application of adhesive titanium or chromium sublayer, magnetron sputtering of titanium target in gas mixture of acetylene and argon under pressure 0.01-1 Pa and precipitation of dispersed particles of target and carbon-containing radicals on product surface in combination with bombardment of surface with ions, accelerated by bias voltage, with product surface being subjected to purification with argon ions from plasma, generated by electronic beam, before application of adhesive sublayer, and gas mixture being activated in the process of coating application by impact with beam of electrons with energy 100 eV.

EFFECT: invention is aimed at increase of coating adhesion and micro-hardness of obtained products, as well as at provision of high efficiency of application of acetylene in the process of coating application.

1 ex, 2 dwg

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RU 2 557 934 C2

Authors

Gavrilov Nikolaj Vasil'Evich

Kamenetskikh Aleksandr Sergeevich

Dates

2015-07-27Published

2013-07-15Filed