METHOD OF OBTAINING MULTILAYER WEAR-RESISTANT DIAMOND-LIKE COATINGS Russian patent published in 2021 - IPC C23C14/24 C23C14/02 C23C14/06 B32B15/04 B82B3/00 

FIELD: machine building.

SUBSTANCE: invention relates to a method of producing a multilayer wear-resistant diamond-like coating in a single vacuum cycle with predetermined properties and can be used in heavy and light industry, transportation to improve operational characteristics of items and increase their service life, parts of friction assemblies, parts of precision machine building. First, the articles are cleaned by electric pulse polishing in an aqueous solution of ammonium salts with subsequent ultrasonic treatment of the article. Thereafter, the article is moved into a vacuum chamber and treated with argon ions and nitrided in a mixture of gases. Then magnetron method is used for surface sedimentation on article surface of alloying elements with thickness of 0.2 mcm from alloy Nb-Hf. After that metal-carbon composite layer is applied with alternation of layers, at that first gradient coating of Cr is applied with linear change of parameters during application from initial to final value during 90 s, and next layer of gradient coating of Al-Si is applied. Thereafter, diamond-like coating is applied by low-energy ion source.

EFFECT: technical result is improved quality of diamond-like films by changing their structure and composition, obtaining a lower layer with high adhesion to the substrate material, medium - with high hardness and high wear resistance, upper - with good heat conductivity and heat resistance and low coefficient of friction.

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