METHOD OF HARD WEAR RESISTANT NANOSTRUCTURED AMORPHOUS DIAMOND-LIKE CARBON COATING Russian patent published in 2018 - IPC B82B3/00 C23C14/06 C23C14/48 

FIELD: technological processes.

SUBSTANCE: invention relates to a method of hard wear resistant nanostructured amorphous diamond-like carbon coating and can be used in metalworking, machine building, medicine, chemical industry. Coating thickness of 200–2,000 nm is obtained with an alternation of two layers, with a total number of layers of 2–100, with a thickness of each layer of 20–1,000 nm. Layers are applied step by step in one working chamber of the plant for applying hardening coatings. Layer of diamond-like hydrocarbon coating obtained from the plasma of chemically active fragments of decomposition of acetylene and argon ions, is created by a plasma source, deposited on a layer of a diamond-like carbon coating obtained from a carbon plasma, which is created by an arc source.

EFFECT: technical result of this method consists in obtaining coatings with interlayer boundaries that prevent the spread of cracks, which increases the wear resistance of coatings.

3 cl, 1 dwg, 1 tbl, 1 ex