METHOD TO PRODUCE ORDERED NANOSTRUCTURED FILMS FROM NANOPARTICLES Russian patent published in 2010 - IPC H01L21/31 B82B1/00 

Abstract RU 2387044 C1

FIELD: electrical engineering.

SUBSTANCE: proposed method comprises structuring the substrate and applying a layer of film material spherical nanoparticles thereon by centrifuging nanoparticles from dispersion. Note here that structuring of the substrate is effected by applying a layer of spherical nanoparticles with diametre larger than that of the film material nanoparticles with the help of centrifuging.

EFFECT: notably finer substrate structuring.

4 cl, 4 dwg, 4 tbl

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RU 2 387 044 C1

Authors

Alfimov Mikhail Vladimirovich

Lebedev-Stepanov Petr Vladimirovich

Khokhlov Pavel Evgen'Evich

Dates

2010-04-20Published

2008-10-17Filed