RESEARCH COMPLEX FOR FORMATION AND INVESTIGATION OF NANOSTRUCTURES AND METHOD TO FORM NANOSTRUCTURES Russian patent published in 2011 - IPC B82B3/00 H01L21/203 

FIELD: nanotechnologies.

SUBSTANCE: invention relates to the field of nanotechnologies and may be used to form nanostructures from evaporated microdrop by exposure to acoustic fields. Complex for formation of nanostructures comprises a nanostructures shaper, an optical microscope, a data display facility and information processing and complex control facility. The nanostructures shaper comprises a foundation and a source of shaping action, at the same time the foundation is formed as piezoelectric with the possibility to apply initial substrate on its surface, and the source of nanostructure-shaping action is represented by surface acoustic waves (SAW), besides, to develop a SAW line, a pair of interdigital transducers (IT) is located on the piezoelectric foundation with the possibility to excite the acoustic field between them, and the shaper is installed in the object area of the optical microscope, at the same time the axis of the microscope sighting is aligned relative to the foundation at the angle φ, besides, the complex also includes a generator of high-frequency oscillations and a wideband amplifier connected to it and to IT.

EFFECT: provision of universality as regards a class of objects exposed to nanostructuring.

12 cl, 1 dwg, 1 tbl